Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10731255 | Film forming method | Yuka NAKASATO, Kohei Doi | 2020-08-04 |
| 10584416 | Substrate processing apparatus | Hitoshi Kato, Yukio Ohizumi, Takeshi Kobayashi | 2020-03-10 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10731255 | Film forming method | Yuka NAKASATO, Kohei Doi | 2020-08-04 |
| 10584416 | Substrate processing apparatus | Hitoshi Kato, Yukio Ohizumi, Takeshi Kobayashi | 2020-03-10 |