SM

Shigehiro Miura

TL Tokyo Electron Limited: 3 patents #70 of 858Top 9%
Overall (2020): #69,413 of 565,922Top 15%
3
Patents 2020

Issued Patents 2020

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
10796902 Film deposition method 2020-10-06
10683573 Film forming apparatus Hitoshi Kato, Hiroyuki Kikuchi, Katsuyoshi Aikawa 2020-06-16
10604837 Film deposition apparatus Hitoshi Kato 2020-03-31