Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796902 | Film deposition method | — | 2020-10-06 |
| 10683573 | Film forming apparatus | Hitoshi Kato, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2020-06-16 |
| 10604837 | Film deposition apparatus | Hitoshi Kato | 2020-03-31 |