Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748758 | Method for depositing a silicon nitride film and film deposition apparatus | Hitoshi Kato, Yutaka Takahashi | 2020-08-18 |
| 10643837 | Method for depositing a silicon nitride film and film deposition apparatus | Hitoshi Kato, Yutaka Takahashi | 2020-05-05 |
| 10636648 | Film deposition method of depositing film and film deposition apparatus | Yutaka Takahashi, Hitoshi Kato | 2020-04-28 |