Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867778 | Cleaning method and processing apparatus | Toshikatsu TOBANA | 2020-12-15 |
| 10861675 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Hirofumi Haga, Shinichi Kozuka, Wataru Ozawa, Akihiro Sakamoto +2 more | 2020-12-08 |