Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879135 | Overlay error and process window metrology | Shang-Wei Fang, Jing-Sen Wang, Yuan-Yao Chang, Wei-Ray Lin, Ting-Hua Hsieh +1 more | 2020-12-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879135 | Overlay error and process window metrology | Shang-Wei Fang, Jing-Sen Wang, Yuan-Yao Chang, Wei-Ray Lin, Ting-Hua Hsieh +1 more | 2020-12-29 |