Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879135 | Overlay error and process window metrology | Shang-Wei Fang, Yuan-Yao Chang, Wei-Ray Lin, Ting-Hua Hsieh, Pei-Hsuan Lee +1 more | 2020-12-29 |
| 10605855 | Method, test line and system for detecting semiconductor wafer defects | Yuan-Yao Chang, Hung-Chi Chiu, Chia-Wei Huang | 2020-03-31 |