Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768527 | Resist solvents for photolithography applications | Kuan-Hsin Lo, Yahru Cheng, Ching-Yu Chang, Chin-Hsiang Lin | 2020-09-08 |
| 10770293 | Method for manufacturing a semiconductor device | Yahru Cheng, Ching-Yu Chang | 2020-09-08 |
| 10755927 | Anti-reflective gap filling materials and methods | Ching-Yu Chang | 2020-08-25 |