Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875764 | High efficiency getter design in vacuum MEMS device | Ting-Jung Chen | 2020-12-29 |
| 10870574 | Method and apparatus for reducing in-process and in-use stiction for MEMS devices | Chang-Ming Wu, Shih-Chang Liu, Yuan-Chih Hsieh | 2020-12-22 |
| 10872777 | Self-aligned double patterning (SADP) method | Jui-Yu Pan, Kuo-Chyuan Tzeng, Ying Chen | 2020-12-22 |
| 10784091 | Process and related device for removing by-product on semiconductor processing chamber sidewalls | Jing Liao, Chang-Ming Wu | 2020-09-22 |
| 10683204 | Semiconductor arrangement and formation thereof | Chung-Yen Chou, Chia-Shiung Tsai, Ru-Liang Lee | 2020-06-16 |
| 10562763 | Fence structure to prevent stiction in a MEMS motion sensor | Chang-Ming Wu | 2020-02-18 |
| 10526199 | High efficiency getter design in vacuum MEMS device | Ting-Jung Chen | 2020-01-07 |