Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875764 | High efficiency getter design in vacuum MEMS device | Lee-Chuan Tseng | 2020-12-29 |
| 10766763 | Sidewall stopper for MEMS device | Shih-Wei Lin, Chang-Ming Wu | 2020-09-08 |
| 10526199 | High efficiency getter design in vacuum MEMS device | Lee-Chuan Tseng | 2020-01-07 |