Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10868242 | Sub 60nm etchless MRAM devices by ion beam etching fabricated T-shaped bottom electrode | Yi Yang, Yu-Jen Wang | 2020-12-15 |
| 10868237 | Self-aligned encapsulation hard mask to separate physically under-etched MTJ cells to reduce conductive R-deposition | Yi Yang, Vignesh Sundar, Yu-Jen Wang | 2020-12-15 |
| 10797232 | Low resistance MgO capping layer for perpendicularly magnetized magnetic tunnel junctions | Sahil Patel, Guenole Jan, Ru-Ying Tong, Vignesh Sundar, Yu-Jen Wang +2 more | 2020-10-06 |
| 10770654 | Multiple spacer assisted physical etching of sub 60nm MRAM devices | Yi Yang, Yu-Jen Wang | 2020-09-08 |
| 10756137 | MTJ patterning without etch induced device degradation assisted by hard mask trimming | Yi Yang, Yu-Jen Wang | 2020-08-25 |
| 10714680 | Large height tree-like sub 30nm vias to reduce conductive material re-deposition for sub 60nm MRAM devices | Yi Yang, Yu-Jen Wang | 2020-07-14 |
| 10700269 | Post treatment to reduce shunting devices for physical etching process | Yu-Jen Wang, Vignesh Sundar, Sahil Patel | 2020-06-30 |
| 10680168 | Ion beam etching fabricated sub 30nm vias to reduce conductive material re-deposition for sub 60nm MRAM devices | Yi Yang, Zhongjian Teng, Jesmin Haq, Yu-Jen Wang | 2020-06-09 |