Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867775 | Apparatus and method for treating substrate | Jamyung Gu, Jong Hwan An, Saewon Na, Jun Ho Lee, Jungmo Gu | 2020-12-15 |
| 10563919 | Method, system, and apparatus for controlling a temperature of a substrate in a plasma processing chamber | Jung Min Won, Ik Jin Choi, Hyo Seong SEONG | 2020-02-18 |