Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10563919 | Method, system, and apparatus for controlling a temperature of a substrate in a plasma processing chamber | Jung Min Won, Ik Jin Choi, Shin-Woo Nam | 2020-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10563919 | Method, system, and apparatus for controlling a temperature of a substrate in a plasma processing chamber | Jung Min Won, Ik Jin Choi, Shin-Woo Nam | 2020-02-18 |