Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867775 | Apparatus and method for treating substrate | Jamyung Gu, Shin-Woo Nam, Saewon Na, Jun Ho Lee, Jungmo Gu | 2020-12-15 |
| 10753800 | Calibrator of an optical emission spectroscopy | Jeong-Il Mun, Hyung Joo Lee, Jong-Woo Sun, Ja Myung GU, Jae Woong Hwang | 2020-08-25 |
| 10600618 | Plasma generation apparatus, substrate treating apparatus including the same, and control method for the plasma generation apparatus | Ogsen Galstyan, Young Bin Kim, Jamyung Gu | 2020-03-24 |