Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825666 | Plasma monitoring apparatus and plasma processing system | Kyeong-Hun KIM, Jeong-Il Mun, Hyung Joo Lee, Dong Kyu Kim | 2020-11-03 |
| 10790122 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Jung Pyo Hong, Jung-Mo Sung | 2020-09-29 |
| 10753800 | Calibrator of an optical emission spectroscopy | Jeong-Il Mun, Hyung Joo Lee, Ja Myung GU, Jae Woong Hwang, Jong Hwan An | 2020-08-25 |
| 10748749 | Plasma monitoring apparatus, and plasma processing apparatus including the same | Jeong-Il Mun, Kyeong-Hun KIM, See Yub Yang, Hyung Joo Lee | 2020-08-18 |