Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825666 | Plasma monitoring apparatus and plasma processing system | Kyeong-Hun KIM, Hyung Joo Lee, Jong-Woo Sun, Dong Kyu Kim | 2020-11-03 |
| 10753800 | Calibrator of an optical emission spectroscopy | Hyung Joo Lee, Jong-Woo Sun, Ja Myung GU, Jae Woong Hwang, Jong Hwan An | 2020-08-25 |
| 10748749 | Plasma monitoring apparatus, and plasma processing apparatus including the same | Kyeong-Hun KIM, See Yub Yang, Hyung Joo Lee, Jong-Woo Sun | 2020-08-18 |