Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825666 | Plasma monitoring apparatus and plasma processing system | Jeong-Il Mun, Hyung Joo Lee, Jong-Woo Sun, Dong Kyu Kim | 2020-11-03 |
| 10748749 | Plasma monitoring apparatus, and plasma processing apparatus including the same | Jeong-Il Mun, See Yub Yang, Hyung Joo Lee, Jong-Woo Sun | 2020-08-18 |