Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867775 | Apparatus and method for treating substrate | Shin-Woo Nam, Jong Hwan An, Saewon Na, Jun Ho Lee, Jungmo Gu | 2020-12-15 |
| 10600618 | Plasma generation apparatus, substrate treating apparatus including the same, and control method for the plasma generation apparatus | Ogsen Galstyan, Young Bin Kim, Jong Hwan An | 2020-03-24 |