Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10843223 | Substrate processing method and substrate processing apparatus | Takayoshi Tanaka, Tetsuya EMOTO, Akira OATO, Yuta Nakano, Teppei Nakano +4 more | 2020-11-24 |
| 10786836 | Substrate processing method and substrate processing apparatus | Atsuyasu Miura, Kazuhiro Fujita, Hiroki Tsujikawa, Kenji Takemoto | 2020-09-29 |
| 10658203 | Substrate processing apparatus and processing cup cleaning method | Hiroki Tsujikawa, Masahide Ikeda, Atsuyasu Miura, Kazuhiro Fujita | 2020-05-19 |
| 10639683 | Recovery piping cleaning method and substrate processing apparatus | Atsuyasu Miura, Hiroki Tsujikawa, Kazuhiro Fujita, Masahide Ikeda | 2020-05-05 |
| 10622225 | Substrate processing apparatus and nozzle cleaning method | Atsuyasu Miura, Masahide Ikeda, Hiroki Tsujikawa, Kazuhiro Fujita | 2020-04-14 |