Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10786836 | Substrate processing method and substrate processing apparatus | Atsuyasu Miura, Kazuhiro Fujita, Yuya Tsuchihashi, Kenji Takemoto | 2020-09-29 |
| 10658203 | Substrate processing apparatus and processing cup cleaning method | Masahide Ikeda, Atsuyasu Miura, Kazuhiro Fujita, Yuya Tsuchihashi | 2020-05-19 |
| 10639683 | Recovery piping cleaning method and substrate processing apparatus | Yuya Tsuchihashi, Atsuyasu Miura, Kazuhiro Fujita, Masahide Ikeda | 2020-05-05 |
| 10622225 | Substrate processing apparatus and nozzle cleaning method | Atsuyasu Miura, Masahide Ikeda, Kazuhiro Fujita, Yuya Tsuchihashi | 2020-04-14 |