Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658203 | Substrate processing apparatus and processing cup cleaning method | Hiroki Tsujikawa, Atsuyasu Miura, Kazuhiro Fujita, Yuya Tsuchihashi | 2020-05-19 |
| 10639683 | Recovery piping cleaning method and substrate processing apparatus | Yuya Tsuchihashi, Atsuyasu Miura, Hiroki Tsujikawa, Kazuhiro Fujita | 2020-05-05 |
| 10622225 | Substrate processing apparatus and nozzle cleaning method | Atsuyasu Miura, Hiroki Tsujikawa, Kazuhiro Fujita, Yuya Tsuchihashi | 2020-04-14 |