Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832923 | Lower plasma-exclusion-zone rings for a bevel etcher | Tong Fang, Keechan Kim, George Stojakovic | 2020-11-10 |
| 10811282 | Upper plasma-exclusion-zone rings for a bevel etcher | Tong Fang, Keechan Kim, George Stojakovic | 2020-10-20 |
| 10770297 | Method to form ultrashallow junctions using atomic layer deposition and annealing | Edmund Burte, Bodo Kalkofen | 2020-09-08 |
| 10748747 | Edge exclusion control with adjustable plasma exclusion zone ring | Keechan Kim | 2020-08-18 |
| 10714345 | Plasma assisted doping on germanium | Hyuk-Jun Kwon | 2020-07-14 |
| 10629458 | Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter | Tong Fang, Keechan Kim, George Stojakovic | 2020-04-21 |