Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770297 | Method to form ultrashallow junctions using atomic layer deposition and annealing | Yunsang Kim, Bodo Kalkofen | 2020-09-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770297 | Method to form ultrashallow junctions using atomic layer deposition and annealing | Yunsang Kim, Bodo Kalkofen | 2020-09-08 |