Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770297 | Method to form ultrashallow junctions using atomic layer deposition and annealing | Yunsang Kim, Edmund Burte | 2020-09-08 |
BK
Bodo Kalkofen
Overall (2020): #532,136 of 565,922Top 95%
1
Patents 2020