Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832923 | Lower plasma-exclusion-zone rings for a bevel etcher | Yunsang Kim, Keechan Kim, George Stojakovic | 2020-11-10 |
| 10811282 | Upper plasma-exclusion-zone rings for a bevel etcher | Yunsang Kim, Keechan Kim, George Stojakovic | 2020-10-20 |
| 10629458 | Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter | Yunsang Kim, Keechan Kim, George Stojakovic | 2020-04-21 |