Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685811 | Switchable matching network and an inductively coupled plasma processing apparatus having such network | Kui Zhao, Hiroshi Iizuka, Xiaobei Pang | 2020-06-16 |
| 10685814 | Processing chamber, combination of processing chamber and loadlock, and system for processing substrates | Heng Tao, Qian Wang | 2020-06-16 |
| 10529577 | Device of changing gas flow pattern and a wafer processing method and apparatus | Zhilin Huang | 2020-01-07 |