Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685814 | Processing chamber, combination of processing chamber and loadlock, and system for processing substrates | Tuqiang Ni, Qian Wang | 2020-06-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685814 | Processing chamber, combination of processing chamber and loadlock, and system for processing substrates | Tuqiang Ni, Qian Wang | 2020-06-16 |