Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685811 | Switchable matching network and an inductively coupled plasma processing apparatus having such network | Kui Zhao, Hiroshi Iizuka, Tuqiang Ni | 2020-06-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685811 | Switchable matching network and an inductively coupled plasma processing apparatus having such network | Kui Zhao, Hiroshi Iizuka, Tuqiang Ni | 2020-06-16 |