Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529577 | Device of changing gas flow pattern and a wafer processing method and apparatus | Tuqiang Ni | 2020-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529577 | Device of changing gas flow pattern and a wafer processing method and apparatus | Tuqiang Ni | 2020-01-07 |