Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854486 | System and method for characterization of buried defects | Jan Lauber | 2020-12-01 |
| 10605744 | Systems and methods for detecting defects on a wafer | Lu Chen, Mohan Mahadevan, James A. Smith, Lisheng Gao, Junqing Huang +2 more | 2020-03-31 |