LC

Lu Chen

KL Kla-Tencor: 1 patents #130 of 345Top 40%
Overall (2020): #372,081 of 565,922Top 70%
1
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10605744 Systems and methods for detecting defects on a wafer Jason Kirkwood, Mohan Mahadevan, James A. Smith, Lisheng Gao, Junqing Huang +2 more 2020-03-31