Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692782 | Control device, substrate processing system, substrate processing method, and program | Takahito Kasai, Yozo Nagata | 2020-06-23 |
| 10640871 | Heat treatment system, heat treatment method, and program | Hiroichi Ota, Shingo SEKISAWA | 2020-05-05 |
| 10607869 | Substrate processing system and control device | Takahito Kasai | 2020-03-31 |
| D877704 | Electrical connector | — | 2020-03-10 |
| 10545478 | Substrate processing system, control device, group controller, and host computer | — | 2020-01-28 |