Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692782 | Control device, substrate processing system, substrate processing method, and program | Yuichi Takenaga, Takahito Kasai | 2020-06-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692782 | Control device, substrate processing system, substrate processing method, and program | Yuichi Takenaga, Takahito Kasai | 2020-06-23 |