Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692782 | Control device, substrate processing system, substrate processing method, and program | Yuichi Takenaga, Yozo Nagata | 2020-06-23 |
| 10607869 | Substrate processing system and control device | Yuichi Takenaga | 2020-03-31 |