HO

Hiroichi Ota

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #448,779 of 565,922Top 80%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10640871 Heat treatment system, heat treatment method, and program Yuichi Takenaga, Shingo SEKISAWA 2020-05-05