Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847337 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2020-11-24 |
| 10808310 | Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber | Kartik Shah, Edric Tong, Prashanth Vasudeva | 2020-10-20 |
| 10685821 | Physical vapor deposition processing systems target cooling | Sanjay Bhat, Vibhu Jindal | 2020-06-16 |
| 10636626 | Dogbone inlet cone profile for remote plasma oxidation chamber | Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2020-04-28 |
| 10619235 | Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber | Kartik Shah, Edric Tong, Prashanth Vasudeva | 2020-04-14 |