Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755900 | Multi-layer plasma erosion protection for chamber components | Laksheswar Kalita, Tae Won Kim, Dmitry Lubomirsky, Xiaowei Wu, Xiao-Ming He +2 more | 2020-08-25 |
| 10559451 | Apparatus with concentric pumping for multiple pressure regimes | Nikolai Kalnin, Dmitry Lubomirsky | 2020-02-11 |
| 10550472 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2020-02-04 |