Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770269 | Apparatus and methods for reducing particles in semiconductor process chambers | Andrew Nguyen, Bradley J. Howard, Shahid Rauf, Ajit Balakrishna, Kenneth S. Collins +3 more | 2020-09-08 |
| 10629473 | Footing removal for nitride spacer | Jungmin Ko | 2020-04-21 |
| 10600639 | SiN spacer profile patterning | Jungmin Ko, Nitin K. Ingle, Kwang Soo Kim, Theodore Wou | 2020-03-24 |