Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10752994 | Apparatus and method for depositing a coating on a substrate at atmospheric pressure | David N. Ruzic, Yuilun Wu, Ivan Shchelkanov, Jungmi Hong, Zihao Ouyang | 2020-08-25 |
| 10699879 | Two piece electrode assembly with gap for plasma control | Tien Fak Tan, Saravjeet Singh, Dmitry Lubomirsky, Tae Wan Kim, Kenneth D. Schatz +1 more | 2020-06-30 |
| 10593560 | Magnetic induction plasma source for semiconductor processes and equipment | Soonwook Jung, Junghoon Kim, Satoru Kobayashi, Kenneth D. Schatz, Soonam Park +1 more | 2020-03-17 |