Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872748 | Systems and methods for correcting non-uniformities in plasma processing of substrates | Harmeet Singh, Keith Gaff, Brett C. Richardson | 2020-12-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872748 | Systems and methods for correcting non-uniformities in plasma processing of substrates | Harmeet Singh, Keith Gaff, Brett C. Richardson | 2020-12-22 |