Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837121 | Susceptor support | Errol Antonio C. Sanchez, David K. Carlson, Mehmet Tugrul Samir | 2020-11-17 |
| 10755955 | Substrate transfer mechanism to reduce back-side substrate contact | Masato Ishii, Richard Giljum, Alexander Berger | 2020-08-25 |