Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755955 | Substrate transfer mechanism to reduce back-side substrate contact | Richard O. Collins, Richard Giljum, Alexander Berger | 2020-08-25 |
| 10607837 | Gas flow control for EPI thickness uniformity improvement | — | 2020-03-31 |