Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811301 | Dual-zone heater for plasma processing | Xing Lin, Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2020-10-20 |
| 10793954 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2020-10-06 |
| 10544508 | Controlling temperature in substrate processing systems | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou | 2020-01-28 |
| 10541159 | Processing chamber with irradiance curing lens | Orlando Trejo, Tza-Jing Gung | 2020-01-21 |