Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825697 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomoyuki Yamada, Tadashi Kontani, Seiyo Nakashima | 2020-11-03 |
| 10640872 | Substrate processing apparatus and method of manufacturing semiconductor device | Atsushi UMEKAWA, Takeo Hanashima, Hiroaki Hiramatsu | 2020-05-05 |