Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825697 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomoyuki Yamada, Seiyo Nakashima, Mikio Ohno | 2020-11-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825697 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomoyuki Yamada, Seiyo Nakashima, Mikio Ohno | 2020-11-03 |