Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804125 | Substrate deformation detection and correction | — | 2020-10-13 |
| 10734232 | Deposition of metal silicide layers on substrates and chamber components | Prashant Kumar Kulshreshtha, Jiarui Wang, Kwangduk Douglas Lee, Xiaoquan Min, Paul Connors | 2020-08-04 |
| 10595477 | Oxide with higher utilization and lower cost | Lei Guo, Praket P. Jha, Deenesh Padhi, Tza-Jing Gung | 2020-03-24 |
| 10593543 | Method of depositing doped amorphous silicon films with enhanced defect control, reduced substrate sensitivity to in-film defects and bubble-free film growth | Praket P. Jha, Deenesh Padhi | 2020-03-17 |