Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622229 | Electrostatic chuck with independent zone cooling and reduced crosstalk | Vijay D. Parkhe | 2020-04-14 |
| 10535544 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2020-01-14 |