Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622189 | Adjustable side gas plenum for edge rate control in a downstream reactor | Andrew Stratton Bravo, Jatinder Kumar | 2020-04-14 |
| 10615009 | System implementing machine learning in complex multivariate wafer processing equipment | John Daugherty, Vahid Vahedi, Richard A. Gottscho | 2020-04-07 |