Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793954 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2020-10-06 |
| 10580626 | Arcing detection apparatus for plasma processing | Lin Zhang, Rongping Wang, Michael S. Cox, Andrew V. LE | 2020-03-03 |