Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790153 | Methods and apparatus for electron beam etching process | Yue Guo, Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane +1 more | 2020-09-29 |
| 10707086 | Etching methods | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Lucy Chen +1 more | 2020-07-07 |
| 10544505 | Deposition or treatment of diamond-like carbon in a plasma reactor | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Lucy Chen +1 more | 2020-01-28 |