Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804170 | Device/health of line (HOL) aware eBeam based overlay (EBO OVL) structure | Hongliang Shen, Guoxiang Ning, Dongsuk Park, Xiaoxiao Zhang, Lan Yang | 2020-10-13 |
| 10642160 | Self-aligned quadruple patterning pitch walking solution | Lei Sun, Guoxiang Ning, Meixiong Zhao | 2020-05-05 |